{"id":"arxiv/2601.04082","url":"https://arxiv.org/abs/2601.04082","tags":["quant-ph","cond-mat.mtrl-sci","physics.app-ph"],"score":0,"title":"Surface Optimization of Superconducting Aluminum Resonators for Robust Quantum Device Fabrication","domain":"quant-ph","source":"arxiv","authors":["Simon J. K. Lang","Ignaz Eisele","Alwin Maiwald","Emir Music","Luis Schwarzenbach","Carla Moran-Guizan","Johannes Weber","Daniela Zahn","Thomas Mayer","Rui N. Pereira","Christoph Kutter"],"reviews":0,"subject":"quant-ph","summary":"Aluminum (Al) remains the central material for superconducting qubits, and considerable effort has been devoted to optimizing its deposition and patterning for quantum devices. However, post-processing strategies focused on oxide removal of niobium (Nb) and tantalum (Ta) -based resonators using buffered oxide etch (BOE), which can not be used for Al. This challenge becomes particularly relevant for industry-scale fabrication with multi-chip bonding, where delays between sample preparation and cooldown require surface treatments that preserve low dielectric loss during extended exposure to…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-01-07","reactions":{}}