{"id":"arxiv/2601.16369","url":"https://arxiv.org/abs/2601.16369","tags":["quant-ph","cond-mat.mtrl-sci","cond-mat.supr-con"],"score":0,"title":"Reducing TLS loss in tantalum CPW resonators using titanium sacrificial layers","domain":"quant-ph","source":"arxiv","authors":["Zachary Degnan","Chun-Ching Chiu","Yi-Hsun Chen","David Sommers","Leonid Abdurakhimov","Lihuang Zhu","Arkady Fedorov","Peter Jacobson"],"reviews":0,"subject":"quant-ph","summary":"We demonstrate a substantial reduction in two-level system loss in tantalum coplanar waveguide resonators fabricated on high-resistivity silicon substrates through the use of an ultrathin titanium sacrificial layer. A 0.2nm titanium film, deposited atop pre-sputtered α-tantalum, acts as a solid-state oxygen getter that chemically modifies the native Ta oxide at the metal-air interface. After device fabrication, the titanium layer is removed using buffered oxide etchant, leaving behind a chemically reduced Ta oxide surface. Subsequent high-vacuum annealing further suppresses two-level system…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-01-22","reactions":{}}