{"id":"arxiv/2603.00441","url":"https://arxiv.org/abs/2603.00441","tags":["quant-ph"],"score":0,"title":"Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes","domain":"quant-ph","source":"arxiv","authors":["Simon J. K. Lang","Alexandra Schewski","Ignaz Eisele","Johannes Weber","Carla Moran-Guizan","Zhen Lou","Moritz Singer","Benedikt Schoof","Marc Tornow","Thomas Mayer","Daniela Zahn","Rui N. Pereira","Christoph Kutter"],"reviews":0,"subject":"quant-ph","summary":"We report on the fabrication and characterization of superconducting coplanar waveguide (CPW) resonators based on titanium nitride (TiN) thin films deposited on 200\\,mm diameter high-resistivity Si(100) substrates. We systematically investigate how deposition conditions, dry-etch power and in-situ resist strip temperature affect morphology, superconducting properties and dielectric losses. By tuning reactive sputtering conditions, three distinct preferred out-of-plane crystal orientations - (111), (200), and a mix of both are achieved. Our results demonstrate that all films exhibit similar…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-02-28","reactions":{}}