{"id":"arxiv/2603.02490","url":"https://arxiv.org/abs/2603.02490","tags":["physics.optics","cond-mat.mes-hall","cond-mat.mtrl-sci","physics.app-ph","quant-ph"],"score":0,"title":"High-Stress Si3N4 Reflective Membranes Monolithically Integrated with Cavity Bragg Mirrors","domain":"physics.optics","source":"arxiv","authors":["Megha Khokhar","Lucas Norder","Paolo M. Sberna","Richard A. Norte"],"reviews":0,"subject":"physics.optics","summary":"High-stress silicon nitride (Si3N4) membranes represent the state-of-the-art for cavity optomechanics, combining ultralow dissipation, optical transparency, and full compatibility with wafer-scale nanofabrication. Yet their integration into high-finesse optical cavities has remained difficult, typically requiring bonding or alignment-sensitive assembly that limits scalability and long-term stability. Here, we introduce a monolithic, wafer-level integration strategy that directly suspends high-stress Si3N4 photonic-crystal membranes above thermally compatible SiN/SiO2 distributed Bragg…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-03-03","reactions":{}}