{"id":"arxiv/2603.14455","url":"https://arxiv.org/abs/2603.14455","tags":["quant-ph"],"score":0,"title":"Quantum-limited traveling-wave parametric amplifier based on DUV-defined planar structures","domain":"quant-ph","source":"arxiv","authors":["Hao Li","Marco Scigliuzzo","Evgenii Guzovskii","Seog-Tae Han","Kyungho Han","Tobias J. Kippenberg"],"reviews":0,"subject":"quant-ph","summary":"The relentless scaling of classical microelectronics has been enabled by the precision and reproducibility of deep-ultraviolet (DUV) optical lithography. Implementing large-scale superconducting quantum processors will require cryogenic microwave components that follow a similarly scalable fabrication path. This need is particularly acute for high circuit-density devices such as traveling-wave parametric amplifiers (TWPAs), where recent implementations have demonstrated high gain, broad bandwidth, high saturation power, and near-quantum-limited noise, but trade-offs between footprint,…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-03-15","reactions":{}}