{"id":"arxiv/2603.17140","url":"https://arxiv.org/abs/2603.17140","tags":["quant-ph","cond-mat.mtrl-sci","physics.app-ph"],"score":0,"title":"Die to wafer direct bonding of (100) single-crystal diamond thin films for quantum optoelectronics","domain":"quant-ph","source":"arxiv","authors":["Dominic Lepage","Amin Yaghoobi","Heidi Tremblay","Dominique Drouin"],"reviews":0,"subject":"quant-ph","summary":"This work unlocks the manufacturing of nanophotonic quantum systems that exploit the unique material properties of single-crystal diamond (SCD). We achieve this by introducing a semiconductor-compatible process for the direct bonding of multiple high-quality, ultrathin diamond films onto a carrier wafer, enabling the subsequent parallel nanofabrication of optoelectronic integrated circuits. Central to this approach is a new diamond surface-preparation method that avoids boiling tri-acid mixtures while producing exceptionally clean 20 um thin single crystals. These platelets are bonded…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-03-17","reactions":{}}