{"id":"arxiv/2603.29065","url":"https://arxiv.org/abs/2603.29065","tags":["quant-ph","cond-mat.mtrl-sci","cond-mat.supr-con"],"score":0,"title":"Oxide-Nitride Heteroepitaxy for Low-Loss Dielectrics in Superconducting Quantum Circuits","domain":"quant-ph","source":"arxiv","authors":["David A. Garcia-Wetten","Mitchell J. Walker","Peter G. Lim","André Vallières","Maria G. Jimenez-Guillermo","Miguel A. Alvarado","Dominic P. Goronzy","Anna Grassellino","Jens Koch","Vinayak P. Dravid","Mark C. Hersam","Michael J. Bedzyk"],"reviews":0,"subject":"quant-ph","summary":"Superconducting qubits show great promise for the realization of fault-tolerant quantum computing, but lossy, amorphous dielectrics limit current technology. Identifying highly crystalline and stoichiometric dielectrics with intrinsically low microwave loss is therefore a central materials challenge, yet experimentally validated platforms remain scarce. This work integrates a crystalline dielectric into a heteroepitaxial TiN/$γ$-Al$_2$O$_3$/TiN trilayer grown via pulsed laser deposition. Correlative high-resolution imaging, diffraction, and spectroscopy measurements confirm the…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-03-30","reactions":{}}