{"id":"arxiv/2604.08957","url":"https://arxiv.org/abs/2604.08957","tags":["physics.optics","cond-mat.mes-hall","quant-ph"],"score":0,"title":"A scalable platform for nanometer-scale quantum confinement","domain":"physics.optics","source":"arxiv","authors":["Christina M. Spaegele","Mehdi Rezaee","Thomas Werkmeister","Soon Wei Daniel Lim","Kailyn Vaillancourt","Joon-Suh Park","Paul Chevalier","Ido Kaminer","Philip Kim","Federico Capasso","Michele Tamagnone"],"reviews":0,"subject":"physics.optics","summary":"Overcoming the limitations of current nanofabrication techniques to achieve nanoscale feature sizes is essential for achieving new regimes of light-matter interactions at extreme frequencies and length scales. Here, we demonstrate a scalable nanofabrication platform capable of producing in-plane feature sizes down to 1.75 nm, pushing the boundaries of current top-down nanofabrication techniques. Using precise thickness control of atomic layer deposition (ALD) and employing widely spaced oxide nanofins, we transform conventional ALD into a surface structuring method that produces…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-04-10","reactions":{}}