{"id":"arxiv/2604.11379","url":"https://arxiv.org/abs/2604.11379","tags":["quant-ph"],"score":0,"title":"From GDSII to Wafer: EDA Design Flow and Data Conversion for Wafer-Scale Manufacturing of Superconducting Quantum Chips","domain":"quant-ph","source":"arxiv","authors":["Ling Qiao","Fumin Luo","Qinglang Guo"],"reviews":0,"subject":"quant-ph","summary":"Superconducting quantum computing is advancing toward the thousand- and even million-qubit regime, making wafer-scale fabrication an essential pathway for achieving large-scale, cost-effective quantum processors. This manufacturing paradigm imposes new requirements on quantum-chip electronic design automation (Q-EDA): design tools must not only generate layouts (GDSII files) that satisfy quantum-circuit physical constraints but also ensure that the design data can be seamlessly converted into a complete set of manufacturing files executable by a wafer foundry, thereby enabling reliable…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-04-13","reactions":{}}