{"id":"arxiv/2604.22086","url":"https://arxiv.org/abs/2604.22086","tags":["quant-ph","cond-mat.mtrl-sci"],"score":0,"title":"Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes","domain":"quant-ph","source":"arxiv","authors":["Ekta Bhatia","Yingge Du","Krishna P Koirala","Chung Kow","Mingzhao Liu","Juan Macy","Tharanga R. Nanayakkara","Francisco Ponce","Satyavolu S. Papa Rao","Drew J. Rebar","Peter V. Sushko","Brent A VanDevender","Chongmin Wang","Marvin G. Warner","Zhihao Xiao"],"reviews":0,"subject":"quant-ph","summary":"Surface oxides contribute to losses in superconducting transmon devices resulting in degraded performance. We explore the use of the damascene process to replace the sidewall native oxide of a device with a metal/substrate interface. We simulate sidewall oxidation by burying an oxide layer during fabrication. We observe a modest improvement between the two types of devices, which is suggestive of a reduction in the surface participation ratio.","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-04-23","reactions":{}}