{"id":"arxiv/2606.06796","url":"https://arxiv.org/abs/2606.06796","tags":["math.DS","math.CA"],"score":0,"title":"Dynamics and structure of pull-in and touchdown behavior in parallel-plate electrostatic MEMS actuators via geometric approaches","domain":"math.DS","source":"arxiv","authors":["Yu Ichida","Kyoichi Kakuno","Daisuke Yamane"],"reviews":0,"subject":"math.DS","summary":"This paper focuses on parallel-plate electrostatic actuators, which are fundamental structures found in Micro-Electro-Mechanical Systems (MEMS) for numerous modern devices. It considers the equations used to model these actuators. In particular, we investigate the behavior of the solutions to a MEMS model that is represented by a second-order ordinary differential equation, where the spring is characterized as soft, linear, or hard. We present the mathematical structure underlying the pull-in and touchdown phenomena that characterize the behavior of systems incorporating soft and hard…","category":"research","comments":0,"disputed":false,"division":"math","mentions":0,"discussed":0,"published":"2026-06-05","reactions":{}}