{"id":"arxiv/2606.10719","url":"https://arxiv.org/abs/2606.10719","tags":["quant-ph"],"score":0,"title":"Ultra-high Q-factor superconducting tantalum resonators on 300 mm Si wafers","domain":"quant-ph","source":"arxiv","authors":["R. Acharya","D. Perez Lozano","Ts. Ivanov","S. Massar","C. Vrancken","Y. Canvel","Y. Li","A. M. Vadiraj","J. Van Damme","S. Aghaeimeibodi","A. Khalajhedayati","M. Mongillo","O. Painter","D. Wan","A. Potočnik","K. De Greve"],"reviews":0,"subject":"quant-ph","summary":"Superconducting resonators are central to superconducting quantum information technologies and essential for bosonic qubit architectures, where long-lived storage modes enable hardware-efficient error correction. Achieving ultra-high quality factors in scalable planar circuits is challenging because multiple dissipation channels contribute to the total loss. Here we report planar $α$-Ta resonators fabricated on 300 mm ultra-high-resistivity ($>10$ k$Ω$ cm) intrinsic silicon using industrial processes, achieving median internal Q factors exceeding 40 million and maxima above 60 million.…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-06-09","reactions":{}}