{"id":"arxiv/2607.22294","url":"https://arxiv.org/abs/2607.22294","tags":["cond-mat.mtrl-sci","cond-mat.supr-con","quant-ph"],"score":0,"title":"Substrate-metal interface engineering enhances TaN/Ta thin film superconducting resonator performance","domain":"cond-mat.mtrl-sci","source":"arxiv","authors":["Moritz Singer","Harsh Gupta","Benedikt Schoof","Elena Willinger","Anton Orekhov","Alexandra Schewski","Samuil Kostadinov","Philip Constantin Schneider","Marc Tornow"],"reviews":0,"subject":"cond-mat.mtrl-sci","summary":"Tantalum has been demonstrated as a promising material for superconducting qubits. However, comparatively little attention has been given to its nitrides. Tantalum nitride exhibits a range of stoichiometries, resulting in a variety of material properties, including both superconducting and non-superconducting phases. Owing to this versatility, tantalum nitrides can serve multiple purposes in superconducting qubits: as seed layers for alpha-Ta growth, as a superconducting base material and as a non-superconducting barrier in the Josephson junction. In this study, we explore the performance of…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-07-24","reactions":{}}