{"id":"arxiv/2608.27057","url":"https://arxiv.org/abs/2608.27057","tags":["quant-ph","cond-mat.mes-hall"],"score":0,"title":"Fast On-Chip Thermometry with TiN Kinetic Inductance Resonators in 22 nm Process Technology","domain":"quant-ph","source":"arxiv","authors":["Johann Drayne","George Ridgard","Lorenzo Peri","Frederic Schlattner","Fabio Olivieri","Mathieu de Kruijf","Isaac Harris","Grayson Noah","James Kirkman","Alberto Gomez-Saiz","M. Fernando Gonzalez-Zalba","Thomas Swift"],"reviews":0,"subject":"quant-ph","summary":"Understanding the temporal and spatial dependence of temperature is critical in high-performance cryogenic devices. Typical thermometry techniques struggle to simultaneously combine high bandwidth, sensitivity and on-chip integration, limiting their ability to measure fast intra-device thermal fluctuations. Here, we demonstrate a time-resolved thermometry platform based on TiN kinetic inductance resonators integrated in a 22 nm FDSOI chip. By tracking temperature-dependent shifts in the resonant frequency, we achieve sub-millikelvin temperature sensitivity down to temperatures of 100 mK.…","category":"research","comments":0,"disputed":false,"division":"physics","mentions":0,"discussed":0,"published":"2026-08-27","reactions":{}}