Characterization of Silicon-Membrane TES Microcalorimeters for Large-Format X-ray Spectrometers with Integrated Microwave SQUID Readout

Avirup Roy, Robinjeet Singh, Joel C. Weber, W. B. Doriese, Johnathon Gard, Mark W. Keller, John A. B. Mates, Kelsey M. Morgan, Nathan J. Ortiz, Daniel S. Swetz, Daniel R. Schmidt, Joel N. Ullom, Evan P. Jahrman, Thomas C. Allison, Sasawat Jamnuch, John Vinson, Charles J. Titus, Cherno Jaye, Daniel A. Fischer, Galen C. O'Neil

arXivarxiv/2601.09629Jan 14, 2026physics.ins-detscore 0

We present the electro-thermal characterization of transition-edge sensor (TES) detectors suspended on Si membranes fabricated using a silicon-on-insulator (SOI) wafer. The use of an all-silicon fabrication platform, in contrast to the more commonly used silicon nitride membranes, is compatible with monolithic fabrication of integrated TES and SQUID circuits. The all-silicon architecture additionally allows efficient use of focal plane area; the readout circuitry may be positioned out of the focal plane by bending a thinned portion of the chip. Compatibility with integrated fabrication and…

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