Statistical Topological Gradient and Shape Optimization for Robust Metal--Semiconductor Contact Reconstruction
We develop a statistically robust framework for reconstructing metal--semiconductor contact regions using topological gradients. The inverse problem is formulated as the identification of an unknown contact region from boundary measurements governed by an elliptic model with piecewise coefficients. Deterministic stability of the topological gradient with respect to measurement noise is established, and the analysis is extended to a statistical setting with multiple independent observations. A central limit theorem in a separable Hilbert space is proved for the empirical topological gradient,…
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