Methods for characterization of atomic-scale field emission point-electron-source

Shuai Tang, Mingkai Gou, Yingzhou Hu, Jie Tang, Yan Shen, Yu Zhang, Lu-Chang Qin, Ningsheng Xu, Richard G. Forbes, Shaozhi Deng

arXivarxiv/2603.06499Mar 6, 2026quant-phscore 0

Field emission (FE) electron sources are made close to atomic-scale to reach the highest spatial resolution as well as stable emission for electron microscopy, electron beam inspection and lithography. At present, no single agreed method exists of using FE current-voltage data to extract the apparent emission area, which is needed for predicting some beam properties. The 1956 theory of Murphy and Good (MG) is better physics than the 1920s theory of Fowler and Nordheim (FN) and colleagues, but many researchers use simplified FN theory to analyse experimental data. The present paper reports an…

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