High precision micro-optical elements on fiber facets via focused-ion beam machining
Fiber-integrated micro-optical elements promise a scalable approach to photon collection and beam shaping for quantum information processing. Here, we demonstrate single-step micro-machining of micro-spherical, micro-spiral, and micro-axicon structures directly onto the core of single-mode optical fibers using focused-ion beam (FIB) machining with nanometer-scale precision. Atomic force microscopy reveals that micro-concave and micro-convex spherical surfaces achieve shape accuracies of $λ/50$ and $λ/33$ (at $λ= 633$~nm), respectively. Via optical characterization using a He-Ne laser…
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