Wideband Balanced Photodetectors for Classical and Quantum Light Detection from Optical, EUV, to X-rays

Ivan Ryger, Terry Brown, Dina S. Eissa, Chen-Ting Liao

arXivarxiv/2605.24199May 22, 2026physics.ins-detscore 0

The rapid development of coherent short-wavelength light sources in the extreme ultraviolet (EUV) and soft X-ray (SXR) regimes has created a growing need for advanced optoelectronic detection capabilities, particularly for quantum-noise-limited measurements, microelectronics and semiconductor metrology, and emerging quantum information applications. However, extending balanced photodetection to these wavelength regimes is severely hindered by a fundamental bandwidth-noise trade-off imposed by the exceptionally large junction capacitance of EUV-SXR silicon photodiodes. Here, we report a novel…

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