Impact of Stoichiometry of MoSi Thin Films for Enhanced Sensitivity of Superconducting Nanowire Single-Photon Detectors

Stefanie Grotowski, Damjan Pecijareski, Hadrien Le Petit Delacour, Lucio Zugliani, Fabian Wietschorke, Christian Schmid, Stefan Strohauer, Matthias Althammer, Rudolf Gross, Kai Müller, Jonathan Finley

arXivarxiv/2605.27179May 26, 2026cond-mat.supr-conscore 0

We report on the impact of the stoichiometry of superconducting MoSi thin films on the performance of superconducting nanowire single-photon detectors (SNSPDs). Specifically, we investigate the relation between the film parameters critical temperature Tc , sheet resistance Rs and superconductor thickness d and observe a universal scaling behavior. To benchmark the performance of SNSPDs fabricated from films having different stoichiometry, we measure the bias dependent count rate curves, while the detector is illuminated with wavelengths between 780 nm and 1550 nm. The detector performance as…

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