Tantalum as a base material for superconducting integrated circuits

Evgeniy V. Zikiy, Nikita S. Smirnov, Stanislav A. Kotenkov, Ilya A. Stepanov, Julia A. Agafonova, Daria A. Moskaleva, Aleksei R. Matanin, Anton I. Ivanov, Dmitry O. Moskalev, Julia A. Kurochkina, Aleksander V. Andriyash, Ilya A. Rodionov

arXivarxiv/2606.13750Jun 11, 2026quant-phscore 0

The performance of superconducting integrated circuits for quantum applications is fundamentally limited by material-related losses. Tantalum, as an emerging material for next-generation quantum circuits, has attracted considerable attention in recent years after demonstrating breakthrough performance in both superconducting microwave resonators and qubits. Concurrently, a growing body of work is devoted to the operation of tantalum-based circuits and related fabrication techniques. This interest is further stimulated by tantalum thin films polymorphism resulting in a variety of its…

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