Analysis and Numerics of a Stationary Drift-Diffusion Model for Electrical Discharge in MEMS
This work presents the analysis and numerical simulation of a stationary drift-diffusion model for electrical discharge in micro-electro-mechanical systems (MEMS). The model couples Poisson's equation for the electrostatic potential with continuity equations for positive ions and electrons, incorporating a Townsend-type impact ionization source term that depends exponentially on the electric field magnitude. We prove the existence of weak solutions under physically relevant assumptions and establish uniform bounds on the carrier densities. The proof relies on a regularization-approximation…
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