Vanadium superconducting microwave resonators on silicon wafers

Y. Fujita, Y. Urade, Y. Hibino, M. Tsujimoto, K. Inomata, G. Fujii, W. Mizubayashi

arXivarxiv/2607.00809Jul 1, 2026cond-mat.mtrl-sciscore 0

Understanding the correlation between material properties and microwave losses in superconducting films is a crucial subject for developing low-loss materials for quantum circuits. We focus on vanadium (V) as a novel material for superconducting quantum devices and discuss loss in V films in relation to their structural properties. Using a sputtering method, we grow four V-film structures on (001)-oriented Si wafers, employing Nb and Ta as the buffer and capping layer materials, respectively: Nb/V/Ta, Nb/V, V/Ta, and V. X-ray diffraction and atomic force microscopy reveal that the V films…

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