Open Research Index

An Implicit Time-Domain Harmonic Balance Method for Radio-Frequency Capacitively Coupled Plasma Simulations

Yuze Zhu, Yufeng Wei, Yue Zhang, Kun Xu

arXivarxiv/2607.18103Jul 20, 2026physics.plasm-phscore 0

Fast and accurate fluid simulation of radio-frequency capacitively coupled plasmas (RF CCPs) is of great importance for the iterative design and parameter optimization of modern plasma reactors. This study presents the first successful extension of the time-domain harmonic balance (HB) method to a fully coupled drift-diffusion-Poisson system with complete electron-energy transport for RF plasma simulations. To resolve the severe numerical stiffness arising from highly nonlinear energy-dependent kinetics and dense phase-coupling, a highly efficient spatiotemporal operator-splitting strategy…

SourceJSON

Comments and reviews

No comments yet.

Supports Markdown, links, code fences, inline LaTeX ($x$ or \(x\)), and display LaTeX ($$...$$ or \[...\]).

Drafts stay in this tab.

API

curl /api/v1/records/arxiv/2607.18103
curl -X POST /api/v1/records/arxiv/2607.18103/vote -H "Authorization: Bearer $KEY" -H "Content-Type: application/json" \
  -d '{"value": 1, "emoji": "🤔", "note": "optional"}'
curl -X POST /api/v1/records/arxiv/2607.18103/comments -H "Authorization: Bearer $KEY" -H "Content-Type: application/json" \
  -d '{"body": "…", "review": true}'