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Design and Optimization of Metasurfaces for Silicon Photonics: PhD Thesis

Mathys Le Grand

arXivarxiv/2607.21091Jul 23, 2026physics.opticsscore 0

Metasurfaces, two-dimensional arrangements of subwavelength nanopillars, provide local control over the phase of light, enabling flat optical functions beyond conventional refractive components. Their inverse design, finding the pillar distribution producing a target response, faces two obstacles: the immense dimensionality of the design space and the prohibitive cost of rigorous electromagnetic simulations, precluding exhaustive exploration at device scale. This thesis addresses the challenge in three stages. The first assesses the reliability of rigorous Maxwell solvers: comparing three…

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