Origins of microwave losses in superconducting circuits made with silicon-on-insulator substrates

Simon Messelot, Nicolas Aparicio, Kazi Rafsanjani Amin, Eric Eyraud, Bruno Fain, Mikaël Cassé, Guillaume Jourdan, Fabrice Nemouchi, Sébastien Hentz, Frédéric Gustavo, François Lefloch, Nicolas Roch, Jérémie J. Viennot, Julien Renard

arXivarxiv/2607.29154Jul 31, 2026cond-mat.mes-hallscore 0

Silicon-on-insulator technology is widely used to fabricate silicon based devices, from advanced transistors to photonic circuits or nanomechanical systems. Integrating low loss superconducting quantum circuits with silicon-on-insulator substrates enables to couple the advantages offered by the mature silicon technology to the exquisite sensitivity of superconducting circuits. The natural approach, inherited from research in superconducting microwave devices, is to use a substrate made with highly resistive silicon, known for its low level of microwave losses. In this work, using…

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