Niobium Titanium Nitride as a High Tensile Stress Material for Nanomechanics

Korbinian Rubenbauer, Burak E. Bülbüloglu, Thomas Luschmann, Manuel Müller, Stephan Geprägs, Witlef Wieczorek, Eva M. Weig, Matthias Althammer, Hans Huebl

arXivarxiv/2608.07127Aug 7, 2026quant-phscore 0

Over the past decades, high-coherence mechanical resonators have been continuously pushed to new limits, using techniques such as dissipation dilution and clamp-tapering to enhance their quality factor beyond intrinsic material limitations. Today, these mechanical resonators are often fabricated from silicon-nitride, silicon-carbide or aluminum. Recently, however, interest in novel material platforms has grown, especially those allowing for the integration within superconducting circuits. Among these, superconducting nitrides stand out as particularly promising due to their high transition…

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