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Angular displacement readout of a mechanical oscillator with a guided mode resonance

Diego Torres-Barajas, Oscar Angulo, Aman R. Agrawal, Mohamed ElKabbash, Dalziel J. Wilson

arXivarxiv/2608.14447Aug 14, 2026physics.opticsscore 0

Measuring the angular displacement of a mechanical oscillator is a ubiquitous task; however, the multimode nature of angular optomechanical coupling makes coherent signal enhancement challenging. Here we demonstrate coherently enhanced angular displacement readout with an integrated guided mode resonance (GMR) structure, applying it to precision readout of a nanomechanical oscillator. Specifically, we fabricate subwavelength gratings into 100-nm-thick Si$_3$N$_4$ membranes and record their vibration by direct transmission measurements. The narrow linewidth $\approx 2.5\;\text{mrad}$ of the…

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