Ultra-Low-Loss Silicon Nitride on Sapphire for Broad-Transparency Nonlinear and Quantum Photonics

Abdur-Raheem Al-Hallak, Shuai Liu, Kailu Zhou, Jiangnan Liu, Shawn Chen, James Hu, Ruhi Yusuf, Christopher Rodriguez, Maya Sarram, Yiming Lang, Zetian Mi, Zheshen Zhang

arXivarxiv/2608.27335Aug 27, 2026physics.opticsscore 0

The field of photonic integrated circuits (PIC) has flourished in the past two decades, fueling numerous cutting-edge applications across sensing, networking, data interconnect, and quantum information processing. As a guiding material for PIC, Si$_3$N$_4$ has seen extensive use for its ultra-low loss, broad transparency, and diversity in implementation across both thin and thick films. Although the standard, traditional silicon dioxide (SiO$_2$) on silicon (Si) substrates that underpin the majority of Si$_3$N$_4$ photonics face drawbacks in the form of long-wavelength transparency limited…

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