Open Research Index

Scalable integration of silicon carbide color centers into nanophotonic structures

Raphael Wörnle, Jonas Schmid, Dennis Grüner, Jonah Heiler, Flavie Davidson-Marquis, Georgy V. Astakhov, Vadim Vorobyov, Florian Kaiser, Jonathan Körber, Jörg Wrachtrup

arXivarxiv/2609.27601Sep 23, 2026quant-phscore 0

Color centers in silicon carbide are a promising platform for quantum technologies, offering long-coherence electron and nuclear spins for storing and manipulating quantum information, as well as single-photon emission for quantum communication. Low photon collection efficiency is commonly addressed by integrating color centers into nanophotonic devices. Here, we report a scalable method for the deterministic integration of color centers into silicon carbide nanopillars, using the same nanoscale mask for both implantation of oxygen-related color centers (PL5, PL6) and subsequent nanopillar…

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