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Sidewall spacer passivated epitaxial NbN/AlN/NbN Josephson junctions for superconducting qubit applications

Koki Honda, Daiki Kurihara, Hiroki Kutsuma, Hirotaka Terai, Taro Yamashita

arXivarxiv/2610.04820Oct 4, 2026quant-phscore 0

Epitaxial NbN/AlN/NbN Josephson junctions are promising alternatives to conventional Al/AlO$_x$/Al junctions for superconducting qubits due to their crystalline tunnel barriers and the high transition temperature of NbN. However, their integration into quantum circuits typically requires complex fabrication processes involving amorphous interlayer dielectrics, which can degrade qubit coherence times. To address these issues, we developed sidewall spacer passivated epitaxial NbN/AlN/NbN junctions using a fabrication process that reduces both the volume of amorphous dielectric material and…

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