Millisecond phonon lifetimes in piezoelectric nanomechanical resonators
Piezoelectric nanomechanical resonators operating at gigahertz frequencies are a promising platform for quantum information processing and precision sensing, but phonon lifetimes have been limited to the microsecond range, widely attributed to the higher intrinsic loss of piezoelectric materials. Here we show that this limitation is not fundamental. Using a fabrication process informed by recent studies of defect-mediated loss in lithium niobate, we combine chemical restoration of ion-milled surfaces with a shadow-mask metallization process to produce lithium niobate phononic crystal…
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