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Role of dissipation dilution in achieving high mechanical quality factors in van der Waals resonators

Lukas Schleicher, Leonard Geilen, Alexander Musta, Niklas Walter, Anne Rodriguez, Philipp Bredol, Alexander W. Holleitner, Eva M. Weig

arXivarxiv/2610.18288Oct 13, 2026cond-mat.mes-hallscore 0

Dissipation dilution has driven a revolution in the quality factors ($Q$) of top-down nanomechanical resonators. Yet it has not been leveraged for van der Waals (vdW) materials. Here we report quality factors up to $372{,}000\pm37{,}000$ in monolayer MoS$_2$ drums at 4 K, nearly an order of magnitude beyond the previous best for any vdW material at this temperature, enabled by a clean, polymer-free exfoliation technique. We develop a dissipation-dilution model for circular drums and analyze the contributing intrinsic and extrinsic dissipation mechanisms. The MoS$_2$ monolayer exhibits a…

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