Development of a fabrication-to-benchtop process for SiN-based quantum devices

Connor Kupchak, Abubaker Tareki, Tara Moradi, Patrick Laferriere, Niall Tait, Khaled Mnaymneh

arXivarxiv/2610.22776Oct 16, 2026physics.opticsscore 0

Silicon nitride has emerged as a key material for the advancement of future quantum communication and computational devices. However, challenges persist in establishing a comprehensive development process, spanning from fabrication to optical characterization, essential for advancing these devices to their next stage of potential. Maintaining control over the entire process, from start to finish, alongside device modeling, enables more efficient and timely iteration and optimization. Here we introduce a fabrication-to-benchtop process. We employ an in-house stoichiometric recipe for device…

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