Nanopillar metasurfaces uniting high optical reflectivity with ultracoherent nanomechanics
Mechanically compliant mirrors are key components in cavity optomechanics. However, the requirements to achieve the best optical and mechanical performance are usually in direct competition. A high reflectivity for tightly focused beams entails thick reflectors, whereas ultracoherent flexural nanomechanics necessitates thin membranes. We eliminate this trade-off by introducing high-refractive-index nanopillar metasurfaces on top of a thin membrane. We pattern a 50 micrometer-diameter array of nanopillars to form a photonic crystal. The flat band behavior of guided resonances in the photonic…
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