LithoSAGE: Spatially Adaptive and Geometrically Equivariant Neural Operators for Computational Lithography

Source: arxiv.org/abs/2611.08001

Ke Jin, Zhenli Xu, Zilin You

arXivarxiv/2611.08001Nov 5, 2026math.NAscore 0

Operator learning offers an efficient surrogate for lithography simulation, replacing costly numerical solutions with direct model inference. However, existing learning architectures are not designed to simultaneously provide geometric equivariance and adaptability to layout windows with different physical extents, and thus their generalization capability is limited. To address this problem, we propose LithoSAGE, a spatially adaptive and geometrically equivariant neural operator method trained on lithography data. Within its basic Fourier neural operator architecture, spectral weights are…

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