Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes

Simon J. K. Lang, Alexandra Schewski, Ignaz Eisele, Johannes Weber, Carla Moran-Guizan, Zhen Lou, Moritz Singer, Benedikt Schoof, Marc Tornow, Thomas Mayer, Daniela Zahn, Rui N. Pereira, Christoph Kutter

arXivarxiv/2603.00441Feb 28, 2026quant-phscore 0

We report on the fabrication and characterization of superconducting coplanar waveguide (CPW) resonators based on titanium nitride (TiN) thin films deposited on 200\,mm diameter high-resistivity Si(100) substrates. We systematically investigate how deposition conditions, dry-etch power and in-situ resist strip temperature affect morphology, superconducting properties and dielectric losses. By tuning reactive sputtering conditions, three distinct preferred out-of-plane crystal orientations - (111), (200), and a mix of both are achieved. Our results demonstrate that all films exhibit similar…

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