High-Stress Si3N4 Reflective Membranes Monolithically Integrated with Cavity Bragg Mirrors

Megha Khokhar, Lucas Norder, Paolo M. Sberna, Richard A. Norte

arXivarxiv/2603.02490Mar 3, 2026physics.opticsscore 0

High-stress silicon nitride (Si3N4) membranes represent the state-of-the-art for cavity optomechanics, combining ultralow dissipation, optical transparency, and full compatibility with wafer-scale nanofabrication. Yet their integration into high-finesse optical cavities has remained difficult, typically requiring bonding or alignment-sensitive assembly that limits scalability and long-term stability. Here, we introduce a monolithic, wafer-level integration strategy that directly suspends high-stress Si3N4 photonic-crystal membranes above thermally compatible SiN/SiO2 distributed Bragg…

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