Quantum-limited traveling-wave parametric amplifier based on DUV-defined planar structures

Hao Li, Marco Scigliuzzo, Evgenii Guzovskii, Seog-Tae Han, Kyungho Han, Tobias J. Kippenberg

arXivarxiv/2603.14455Mar 15, 2026quant-phscore 0

The relentless scaling of classical microelectronics has been enabled by the precision and reproducibility of deep-ultraviolet (DUV) optical lithography. Implementing large-scale superconducting quantum processors will require cryogenic microwave components that follow a similarly scalable fabrication path. This need is particularly acute for high circuit-density devices such as traveling-wave parametric amplifiers (TWPAs), where recent implementations have demonstrated high gain, broad bandwidth, high saturation power, and near-quantum-limited noise, but trade-offs between footprint,…

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