Delphi.science

From GDSII to Wafer: EDA Design Flow and Data Conversion for Wafer-Scale Manufacturing of Superconducting Quantum Chips

Ling Qiao, Fumin Luo, Qinglang Guo

arXivarxiv/2604.11379Apr 13, 2026quant-phscore 0

Superconducting quantum computing is advancing toward the thousand- and even million-qubit regime, making wafer-scale fabrication an essential pathway for achieving large-scale, cost-effective quantum processors. This manufacturing paradigm imposes new requirements on quantum-chip electronic design automation (Q-EDA): design tools must not only generate layouts (GDSII files) that satisfy quantum-circuit physical constraints but also ensure that the design data can be seamlessly converted into a complete set of manufacturing files executable by a wafer foundry, thereby enabling reliable…

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