Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes

Ekta Bhatia, Yingge Du, Krishna P Koirala, Chung Kow, Mingzhao Liu, Juan Macy, Tharanga R. Nanayakkara, Francisco Ponce, Satyavolu S. Papa Rao, Drew J. Rebar, Peter V. Sushko, Brent A VanDevender, Chongmin Wang, Marvin G. Warner, Zhihao Xiao

arXivarxiv/2604.22086Apr 23, 2026quant-phscore 0

Surface oxides contribute to losses in superconducting transmon devices resulting in degraded performance. We explore the use of the damascene process to replace the sidewall native oxide of a device with a metal/substrate interface. We simulate sidewall oxidation by burying an oxide layer during fabrication. We observe a modest improvement between the two types of devices, which is suggestive of a reduction in the surface participation ratio.

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