Geometric dependence of critical-current variation in Al/AlO${\rm _x}$/Al Josephson junctions: a model-based analysis
Achieving uniform critical current across Josephson junctions is essential for the large-scale integration of superconducting quantum circuits. In this work, we statistically analyzed the variation of the critical current of Al/AlO${\rm _x}$/Al junctions using room-temperature tunnel resistance statistics, and identified the dominant contribution among the modeled sources of the variation based on their dependence on geometry and deposition conditions of junctions. Our model-based analysis reveals that fluctuations in the Al film thickness play the dominant role among the modeled…
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