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Dynamics and structure of pull-in and touchdown behavior in parallel-plate electrostatic MEMS actuators via geometric approaches

Yu Ichida, Kyoichi Kakuno, Daisuke Yamane

arXivarxiv/2606.06796Jun 5, 2026math.DSscore 0

This paper focuses on parallel-plate electrostatic actuators, which are fundamental structures found in Micro-Electro-Mechanical Systems (MEMS) for numerous modern devices. It considers the equations used to model these actuators. In particular, we investigate the behavior of the solutions to a MEMS model that is represented by a second-order ordinary differential equation, where the spring is characterized as soft, linear, or hard. We present the mathematical structure underlying the pull-in and touchdown phenomena that characterize the behavior of systems incorporating soft and hard…

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