Ultra-high Q-factor superconducting tantalum resonators on 300 mm Si wafers

R. Acharya, D. Perez Lozano, Ts. Ivanov, S. Massar, C. Vrancken, Y. Canvel, Y. Li, A. M. Vadiraj, J. Van Damme, S. Aghaeimeibodi, A. Khalajhedayati, M. Mongillo, O. Painter, D. Wan, A. Potočnik, K. De Greve

arXivarxiv/2606.10719Jun 9, 2026quant-phscore 0

Superconducting resonators are central to superconducting quantum information technologies and essential for bosonic qubit architectures, where long-lived storage modes enable hardware-efficient error correction. Achieving ultra-high quality factors in scalable planar circuits is challenging because multiple dissipation channels contribute to the total loss. Here we report planar $α$-Ta resonators fabricated on 300 mm ultra-high-resistivity ($>10$ k$Ω$ cm) intrinsic silicon using industrial processes, achieving median internal Q factors exceeding 40 million and maxima above 60 million.…

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