Fast On-Chip Thermometry with TiN Kinetic Inductance Resonators in 22 nm Process Technology

Johann Drayne, George Ridgard, Lorenzo Peri, Frederic Schlattner, Fabio Olivieri, Mathieu de Kruijf, Isaac Harris, Grayson Noah, James Kirkman, Alberto Gomez-Saiz, M. Fernando Gonzalez-Zalba, Thomas Swift

arXivarxiv/2608.27057Aug 27, 2026quant-phscore 0

Understanding the temporal and spatial dependence of temperature is critical in high-performance cryogenic devices. Typical thermometry techniques struggle to simultaneously combine high bandwidth, sensitivity and on-chip integration, limiting their ability to measure fast intra-device thermal fluctuations. Here, we demonstrate a time-resolved thermometry platform based on TiN kinetic inductance resonators integrated in a 22 nm FDSOI chip. By tracking temperature-dependent shifts in the resonant frequency, we achieve sub-millikelvin temperature sensitivity down to temperatures of 100 mK.…

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