Sidewall Metrology Protocol for Superconducting Qubit Devices

Jørgen Garnæs, Henrik S. Guttesen, Astrid T. Rømer, Oscar Danielsson, Emily P. Duggan, Zhenhai Sun, Asen Lyubenov Georgiev, Li Wei Chang, Morten Kjaergaard, Mark Bieler, Lukas Grünhaupt, Sabbir A. Khan

arXivarxiv/2610.26223Oct 19, 2026quant-phscore 0

Sidewall morphology is a potentially important factor influencing superconducting qubit performance, yet its quantitative characterization remains challenging due to the absence of standardized measurement protocols. In this work, we develop a scanning probe microscopy-based measurement framework for the quantitative characterization of superconducting qubit sidewalls. The framework introduces a refined root mean square lateral sidewall roughness descriptor and a new curvature-equivalent radius for quantifying vertical sidewall morphology. The descriptors and measurement procedures are…

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